X-Ray Microanalysis of Real Materials Using Monte Carlo Simulations

被引:0
|
作者
Raynald Gauvin
Eric Lifshin
机构
[1] McGill University,Department of Metals and Materials Engineering
[2] School of NanoSciences and NanoEngineering,undefined
[3] University at Albany,undefined
来源
Microchimica Acta | 2004年 / 145卷
关键词
Key words: X-ray microanalysis; Monte Carlo; scanning electron microscopy; energy dispersive spectrometry; electron scattering.;
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学科分类号
摘要
Monte Carlo simulations have been used to obtain new results that aid in the microanalysis of sample types frequently encountered in practical analytical situations such as rough surfaces and embedded inclusions. It is shown that the hypothesis that the peak to background is constant on a rough surface is not always true, especially for x-ray lines of low energy and that the peak to background ratio is very sensitive to the electron probe diameter. It is also shown that for embedded inclusions that the shape of the ϕ(z) curves differs significantly from the ϕ(z) curves of bulk homogeneous materials.
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页码:41 / 47
页数:6
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