Synthesis of Nanosized Silicon Dioxide in a Chain Plasma-Chemical Process

被引:0
|
作者
G. E. Remnev
A. I. Pushkarev
机构
[1] Tomsk Polytechnic University,GNU High
来源
High Energy Chemistry | 2004年 / 38卷
关键词
Silicon; Physical Chemistry; Dioxide; Nanosized Silicon Dioxide; Nanosized Silicon;
D O I
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中图分类号
学科分类号
摘要
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页码:348 / 349
页数:1
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