Formation of Zn Films by Magnetron Sputtering on Glass, Quartz and Silicon Substrates

被引:0
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作者
V. A. Polishchuk
V. V. Tomaev
N. B. Leonov
机构
[1] St. Petersburg University of Information Technology,
[2] Mechanics and Optics,undefined
[3] Admiral Makarov State University of Maritime and Inland Shipping,undefined
[4] St. Petersburg State University,undefined
[5] St. Petersburg Mining University,undefined
[6] Saint Petersburg State Institute of Technology (Technical University),undefined
关键词
Zn films; surface morphology; Zn nanocrystals; nuclei of a new phase;
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学科分类号
摘要
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页码:459 / 463
页数:4
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