Interferometric measurement using bimorph actuated staggered mirror (BASM) microsensor

For physical and chemical sensing applications, a bimorph actuated staggered mirror (BASM) microsensor was designed and fabricated by surface micromachining using a transparent quartz substrate. While the conventional cantilever sensors have angular deflection, BASM’s moving mirror performs piston-type pure vertical motion in response to environmental stimuli like temperature change and surface stress change due to molecular adsorption. Since the sensor itself has a fixed or reference mirror as well as a moving mirror, 1) an interferometric measurement is possible without an additional reference mirror in off-axis measurement setup, and 2) vibration measurement noise can be reduced. For preliminary test purposes, interferometric measurement using an optical setup was performed for temperature change. At He-Ne line (632.8 nm), a temperature change of ∼0.8 K caused a minimum-to-maximum interferometric light intensity change which corresponds to ∼144 nm shift of the moving mirror part. An optical diffraction analysis was performed and optimal device parameters were found to maximize the sensor sensitivity.