Diffusion properties of plastically deformed silicon crystals

被引:0
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作者
M. A. Aliev
Kh. O. Alieva
V. V. Seleznev
机构
[1] Russian Academy of Sciences,Institute of Physics, Daghestan Science Center
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关键词
Spectroscopy; Silicon; Indium; State Physics; Impurity Atom;
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学科分类号
摘要
The effect of dislocations generated by electroplastic strain on the electric-field-driven transport of impurity atoms of indium in single crystals of P-silicon is investigated experimentally. It is shown that when electrodiffusion of indium and strain are induced simultaneously, the impurity ions are preferentially dragged towards the anode.
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页码:936 / 937
页数:1
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