Dielectric enhancement of the trilayered Bi3.15Eu0.85Ti3O12/Bi3.15Nd0.85Ti3O12/Bi3.15Eu0.85Ti3O12 thin film deposited on Pt/Ti/SiO2/Si substrate

The trilayered Bi3.15Eu0.85Ti3O12/Bi3.15Nd0.85Ti3O12/Bi3.15Eu0.85Ti3O12 (BET/BNT/BET) thin film was deposited on Pt/Ti/SiO2/Si(100) substrates by metal organic decomposition at annealing temperature of 650 °C, and the microstructure, chemical composition, leakage current, dielectric and ferroelectric properties were investigated by field emission scanning electron microscopy, X-ray diffraction, energy dispersive X-ray spectroscopy, semiconductor characterization system, impedance analyzer and ferroelectric tester. The trilayered thin film is of crack-free and dense surface with some discrete cluster distribution, and typical Bi-layered perovskite polycrystalline phase. The dielectric constant εr and dissipation factor tanδ are 1,233 and 0.0215 at 100 kHz for the trilayered thin film. Comparing with the pure BET and BNT thin films, the dielectric constant of trilayered thin film is enhanced, which is due to the space charge and the intermediate superlattice. The trilayered thin film shows excellent dielectric properties and can be promisingly used for the high dielectric layer of silicon-based embedded capacitors in package substrate.