Ultra-high resolution optical coherence tomography for encapsulation quality inspection

被引：0
|
作者：
J. Czajkowski
T. Fabritius
J. Ulański
T. Marszałek
M. Gazicki-Lipman
A. Nosal
R. Śliż
E. Alarousu
T. Prykäri
R. Myllylä
G. Jabbour
机构：
[1] University of Oulu,Optoelectronics and Measurement Techniques Laboratory
[2] Technical University of Łódź,Department of Molecular Physics
[3] Technical University of Łódź,Institute of Mechanical Engineering
[4] King Abdullah University of Science and Technology,Solar and Photovoltaics Engineering Research Center
来源：
Applied Physics B | 2011年 / 105卷
关键词：
Encapsulation; Optical Coherence Tomography; Photonic Crystal; Optical Coherence Tomography System; Optical Coherence Tomography Measurement;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We present the application of ultra-high resolution optical coherence tomography (UHR-OCT) in evaluation of thin, protective films used in printed electronics. Two types of sample were investigated: microscopy glass and organic field effect transistor (OFET) structure. Samples were coated with thin (1–3 μm) layer of parylene C polymer. Measurements were done using experimental UHR-OCT device based on a Kerr-lens mode locked Ti:sapphire femtosecond laser, photonic crystal fibre and modified, free-space Michelson interferometer. Sub-micron resolution offered by the UHR-OCT system applied in the study enables registration of both interfaces of the thin encapsulation layer. Complete, volumetric characterisation of protective layers is presented, demonstrating possibility to use OCT for encapsulation quality inspection.
引用
收藏
页码：649 / 657
页数：8
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