Using FIB-processed AFM cantilevers to determine microtribology characteristics

被引：0
|
作者：
Y. Ando
T. Nagashima
K. Kakuta
机构：
[1] Mechanical Engineering Laboratory,Micro
[2] Chuo University,Mechanisms Division
来源：
Tribology Letters | 2000年 / 9卷
关键词：
atomic force microscope; wear; contact area; pull-off force; friction force; parallel leaf spring; relative humidity; focused ion beam;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Microtribology characteristics were determined by using a combination of single asperities and three types of FIB (focused ion beam)-processed cantilevers for AFM (atomic force microscope). First, single gold asperities were rubbed with single and parallel leaf springs. For the parallel leaf spring, the pull-off force was proportional to the worn area of the gold asperity peak. The total volume of the gold asperity only slightly changed with rubbing. Second, the friction force on a worn asperity was measured by using a double parallel leaf spring, and the results showed that the friction force was proportional to the sum of the normal load and the pull-off force.
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页码：15 / 23
页数：8
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