Fabrication of Diamond-Like Carbon Emitter Patterns by Room-Temperature Curing Nanoimprint Lithography with PDMS Molds Using Polysiloxane

被引：0
|
作者：
Shuji Kiyohara
Shogo Yoshida
Ippei Ishikawa
Toru Harigai
Hirofumi Takikawa
Masahiko Watanabe
Yoshinari Sugiyama
Yukiko Omata
Yuichi Kurashima
机构：
[1] National Institute of Technology,Electric and Electron System Engineering Course, Department of Multidisciplinary Engineering, Faculty of Advanced Engineering
[2] Maizuru College,Department of Electrical and Electronic Information Engineering
[3] Toyohashi University of Technology,Application and Technical Section
[4] ELIONIX INC.,Research Center for Ubiquitous MEMS and Micro Engineering
[5] National Institute of Advanced Industrial Science and Technology,undefined
来源：
MRS Advances | 2016年 / 1卷 / 16期
关键词：
D O I：
10.1557/adv.2016.49
中图分类号：
学科分类号：
摘要：
We investigated the fabrication of diamond-like carbon (DLC) emitter patterns by room-temperature curing nanoimprint lithography (RTC-NIL) with polydimethylsiloxane (PDMS) molds using polysiloxane, as an application to the emitter for the next generation flat panel display.
引用
收藏
页码：1075 / 1080
页数：5
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