Fabrication of Diamond-Like Carbon Emitter Patterns by Room-Temperature Curing Nanoimprint Lithography with PDMS Molds Using Polysiloxane

被引：0

作者：

Shuji Kiyohara

Shogo Yoshida

Ippei Ishikawa

Toru Harigai

Hirofumi Takikawa

Masahiko Watanabe

Yoshinari Sugiyama

Yukiko Omata

Yuichi Kurashima

机构：

[1] National Institute of Technology,Electric and Electron System Engineering Course, Department of Multidisciplinary Engineering, Faculty of Advanced Engineering

[2] Maizuru College,Department of Electrical and Electronic Information Engineering

[3] Toyohashi University of Technology,Application and Technical Section

[4] ELIONIX INC.,Research Center for Ubiquitous MEMS and Micro Engineering

[5] National Institute of Advanced Industrial Science and Technology,undefined

来源：

MRS Advances | 2016年 / 1卷 / 16期

关键词：

D O I：

10.1557/adv.2016.49

中图分类号：

学科分类号：

摘要：

We investigated the fabrication of diamond-like carbon (DLC) emitter patterns by room-temperature curing nanoimprint lithography (RTC-NIL) with polydimethylsiloxane (PDMS) molds using polysiloxane, as an application to the emitter for the next generation flat panel display.

引用

页码：1075 / 1080

页数：5

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