Study of Distribution of the Electric Field in a Plasma Chamber with Slot Input of Microwave Energy

被引：0
|
作者：
B. M. Brzhozovskii
V. V. Martynov
S. Yu. Molchanov
I. Sh. Bahteev
A. A. Dovgan
机构：
[1] Mechanical Engineering Research Institute,
[2] Russian Academy of Sciences,undefined
[3] Central Institute of Measure Equipment,undefined
来源：
Plasma Physics Reports | 2021年 / 47卷
关键词：
microwave discharge; low-temperature plasma; mathematical simulation; slot waveguide;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：850 / 856
页数：6
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