Dirt reference standard for surface cleanliness measurements

被引:0
|
作者
D. J. O. Orzi
G. M. Bilmes
机构
[1] Centro de Investigaciones Ópticas,Centro de Investigaciones Ópticas, (CONICET
[2] (CONICET-CIC-BA),CIC
[3] Universidad Nacional de La Plata,BA) y Facultad de Ingeniería
来源
Applied Physics A | 2016年 / 122卷
关键词
Acoustic Signal; Carbon Black Particle; Laser Cleaning; Threshold Fluence; Cleanliness Measurement;
D O I
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学科分类号
摘要
Thin films based on polymer poly(isobutyl methacrylate) (PIBMA), doped with carbon black particles deposited on steel plate substrates are proposed as dirt reference standards for cleanliness accreditation methods, particularly for instruments based on laser ablation. The films were made with the spin-coating method, obtaining layers with thickness between 4 and 17 μm. Carbon black particles with sizes smaller than 100 nm and concentrations between 1 and 27.6 mgr/cm3 were used. Characterization of the films was made by using absorbance measurements and laser ablation-induced photoacoustic.
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