Micropump operation at various driving signals: numerical simulation and experimental verification

Impact of the shapes of driving signals on micropump operation is investigated by numerical simulations and by experimental verification on a strip-type microthrottle pump. Numerical simulation is based on an advanced, fully-coupled electro, fluid and solid-mechanics model, enabling detailed analysis of device operation. Flowrate performance and cavitation risk were evaluated by analyzing pressure response in critical points near and under the membrane and by analyzing simulated flowrate response on various excitation waveforms. Sinusoidal excitation provides lower flowrate compared to square-wave excitation (typically 33 % lower) but with significantly smaller risk of cavitation. Sawtooth excitation was found the most inappropriate waveform, providing lowest flowrate performance at high cavitation probability.