On nanoscale, thermal conduction
is affected by system size. The reasons are
increased phonon scattering and changes in phonon group
velocity. In this paper, the in-plane thermal resistivity
of nanoscale silicon thin films is analyzed
by molecular dynamics (MD) techniques. Modifications
to the dispersion relation are calculated directly with
MD methods at high temperature. The results indicate that
the dispersion relation starts to change for very thin
films, at around two nanometers. The reasons are band folding
and phonon confinement.
Thermal resistivity is analyzed by the direct
non-equilibrium method, and the results are compared
to kinetic theory with modified dispersion relations. Thermal
resistivity is affected by both surface scattering and dispersion.
Moreover, in thin films, the characteristic vibrational frequency
decreases, which in standard anharmonic scattering models indicates
a longer relaxation time and affects the resistivity.
The results indicate that in very thin films, the resistivity becomes
highly anisotropic due to differences in surface scattering.
In two cases, surface scattering was found to be the most important mechanism
for increasing thermal resistivity, while in one case, phonon
confinement was found to increase resistivity more than surface
scattering.