Oriented crystallization of thin Pd-Cu films

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作者
V. M. Ievlev
E. K. Belonogov
A. A. Maksimenko
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[1] Voronezh State Technical University,
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68.37.Lp; 81.15.Hi;
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摘要
The phase composition, substructure, and orientation of thin Pd-Cu films obtained by magnetron sputtering of an alloy target and condensation on the (001) surface of phlogopite have been studied by transmission electron microscopy (TEM). Three-orientation epitaxial structures of the β phase with a CsCl structure have been obtained. In epitaxial two-phase solid-solution films, the α and β phases are oriented according to the Nishiyama-Wassermann and Kurdjumov-Sachs orientation relationships. Single-crystal films of α and β solid solutions have been obtained on phlogopite. The plasma effect has been revealed; under the conditions of magnetron sputtering the orientation relationships not typical of epitaxial films of fcc and bcc metals on phlogopite have been realized in the temperature-concentration range of the β ⇄ α phase transformation.
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页码:574 / 579
页数:5
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