Metalorganic chemical vapor deposition growth of InAs/GaSb type II superlattices with controllable AsxSb1-xinterfaces

被引:0
|
作者
Li-Gong Li
Shu-Man Liu
Shuai Luo
Tao Yang
Li-Jun Wang
Feng-Qi Liu
Xiao-Ling Ye
Bo Xu
Zhan-Guo Wang
机构
[1] Chinese Academy of Sciences,Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors
[2] Tsinghua University,Department of Physics
来源
Nanoscale Research Letters | / 7卷
关键词
GaSb; Reflectance Curve; Metalorganic Chemical Vapor Deposition; GaSb Substrate; MOCVD Growth;
D O I
暂无
中图分类号
学科分类号
摘要
InAs/GaSb type II superlattices were grown on (100) GaSb substrates by metalorganic chemical vapor deposition (MOCVD). A plane of mixed As and Sb atoms connecting the InAs and GaSb layers was introduced to compensate the tensile strain created by the InAs layer in the SL. Characterizations of the samples by atomic force microscopy and high-resolution X-ray diffraction demonstrate flat surface morphology and good crystalline quality. The lattice mismatch of approximately 0.18% between the SL and GaSb substrate is small compared to the MOCVD-grown supperlattice samples reported to date in the literature. Considerable optical absorption in 2- to 8-μm infrared region has been realized.
引用
收藏
相关论文
共 50 条
  • [1] Metalorganic chemical vapor deposition growth of InAs/GaSb type II superlattices with controllable As x Sb1-x interfaces
    Li, Li-Gong
    Liu, Shu-Man
    Luo, Shuai
    Yang, Tao
    Wang, Li-Jun
    Liu, Feng-Qi
    Ye, Xiao-Ling
    Xu, Bo
    Wang, Zhan-Guo
    NANOSCALE RESEARCH LETTERS, 2012, 7 : 1 - 7
  • [2] Formation of AsxSb1-x mixing interfaces in InAs/GaSb superlattices grown by metalorganic chemical vapor deposition
    Li, Li-Gong
    Liu, Shu-Man
    Luo, Shuai
    Yang, Tao
    Wang, Li-Jun
    Liu, Feng-Qi
    Ye, Xiao-Ling
    Xu, Bo
    Wang, Zhan-Guo
    EPL, 2012, 97 (03)
  • [3] InAs/GaSb superlattices fabricated by metalorganic chemical vapor deposition
    R. V. Levin
    V. N. Nevedomskii
    B. V. Pushnyi
    N. A. Bert
    M. N. Mizerov
    Technical Physics Letters, 2016, 42 : 96 - 98
  • [4] InAs/GaSb superlattices fabricated by metalorganic chemical vapor deposition
    Levin, R. V.
    Nevedomskii, V. N.
    Pushnyi, B. V.
    Bert, N. A.
    Mizerov, M. N.
    TECHNICAL PHYSICS LETTERS, 2016, 42 (01) : 96 - 98
  • [5] Exploring the optimum growth conditions for InAs/GaSb and GaAs/GaSb superlattices on InAs substrates by metalorganic chemical vapor deposition
    Li, Xin
    Zhao, Yu
    Wu, Qihua
    Teng, Yan
    Hao, Xiujun
    Huang, Yong
    JOURNAL OF CRYSTAL GROWTH, 2018, 502 : 71 - 75
  • [6] Epitaxial growth and characterization of InAs/GaSb and InAs/InAsSb type-II superlattices on GaSb substrates by metalorganic chemical vapor deposition for long wavelength infrared photodetectors
    Huang, Y.
    Ryou, J. -H.
    Dupuis, R. D.
    D'Costa, V. R.
    Steenbergen, E. H.
    Fan, J.
    Zhang, Y. -H.
    Petschke, A.
    Mandl, M.
    Chuang, S. -L.
    JOURNAL OF CRYSTAL GROWTH, 2011, 314 (01) : 92 - 96
  • [7] Metalorganic chemical vapor deposition growth of high-quality InAs/GaSb type II superlattices for mid-IR applications
    Zhang, X. B.
    Petschke, A.
    Mou, S.
    Xu, C.
    Ryou, J. H.
    Chuang, S. L.
    Hsieh, K. C.
    Dupuis, R. D.
    2006 INTERNATIONAL CONFERENCE ON INDIUM PHOSPHIDE AND RELATED MATERIALS CONFERENCE PROCEEDINGS, 2006, : 416 - +
  • [8] Effect of Interface Bond Type on the Structure of InAs/GaSb Superlattices Grown by Metalorganic Chemical Vapor Deposition
    Li Li-Gong
    Liu Shu-Man
    Luo Shuai
    Yang Tao
    Wang Li-Jun
    Liu Feng-Qi
    Ye Xiao-Ling
    Xu Bo
    Wang Zhan-Guo
    CHINESE PHYSICS LETTERS, 2011, 28 (11)
  • [9] Metalorganic Chemical Vapor Deposition Growth of InAs/GaSb Superlattices on GaAs Substrates and Doping Studies of P-GaSb and N-InAs
    Li Li-Gong
    Liu Shu-Man
    Luo Shuai
    Yang Tao
    Wang Li-Jun
    Liu Feng-Qi
    Ye Xiao-Ling
    Xu Bo
    Wang Zhan-Guo
    CHINESE PHYSICS LETTERS, 2012, 29 (07)
  • [10] Effect of growth temperature on surface morphology and structure of InAs/GaSb superlattices grown by metalorganic chemical vapor deposition
    Li, Li-Gong
    Liu, Shu-Man
    Luo, Shuai
    Yang, Tao
    Wang, Li-Jun
    Liu, Jun-Qi
    Liu, Feng-Qi
    Ye, Xiao-Ling
    Xu, Bo
    Wang, Zhan-Guo
    JOURNAL OF CRYSTAL GROWTH, 2012, 359 : 55 - 59