Fabrication and characteristics of PZT thick films on Pt/Ti foil substrates for piezoelectric vibrators

被引：1
|
作者：
Xi-Yun He
Yong Zhang
Ai-Li Ding
Xia Zeng
Ping-Sun Qiu
机构：
[1] Chinese Academy of Sciences,State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics
[2] Jingdezhen Institute of Ceramics,Department of Materials Science and Engineering
来源：
Journal of Electroceramics | 2008年 / 21卷
关键词：
PZT thick films; MOD process; Piezoelectric vibrators;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Crack free perovskite PbZr0.53Ti0.47O3 (PZT (53/47)) thick films up to 30 μm were prepared on flexible platinum-coated titanium foil substrates (Pt/Ti) by a metal organic decomposition (MOD) process. The dielectric, ferroelectric and piezoelectric properties of the films were examined and discussed. A well-saturated hysteresis loop of the thick film was present in almost rectangular shape (Pr = 35 μC/cm2; Ec = 32 kV/cm). The efficient piezoelectric coefficient d33, f of the thick film is about 448 (1 kHz). PZT piezoelectric vibrators were made in bimorph mode. The displacements of the vibrators were investigated as the functions of the applied electric field and the substrate thickness. Under the same condition, the vibrator made from the thinnest Pt/Ti substrate gives the largest displacement.
引用
收藏
页码：871 / 874
页数：3
相关论文
共 50 条
  • [1] Fabrication and characteristics of PZT thick films on Pt/Ti foil substrates for piezoelectric vibrators
    He, Xi-Yun
    Zhang, Yong
    Ding, Ai-Li
    Zeng, Xia
    Qiu, Ping-Sun
    [J]. JOURNAL OF ELECTROCERAMICS, 2008, 21 (1-4) : 871 - 874
  • [2] Fabrication of PZT Thick Films on Silicon Substrates for Piezoelectric Actuator
    Yongbae Jeon
    Jaeshik Chung
    Kwangsoo No
    [J]. Journal of Electroceramics, 2000, 4 : 195 - 199
  • [3] Fabrication of PZT thick films on silicon substrates for piezoelectric actuator
    Jeon, Y
    Chung, JS
    No, K
    [J]. JOURNAL OF ELECTROCERAMICS, 2000, 4 (01) : 195 - 199
  • [4] Fabrication and transverse piezoelectric characteristics of PZT thick-film actuators on alumina substrates
    Sivanandan, K.
    Achuthan, Asha T.
    Kumar, V.
    Kanno, Isaku
    [J]. SENSORS AND ACTUATORS A-PHYSICAL, 2008, 148 (01) : 134 - 137
  • [5] PZT thick films on different ceramic substrates; piezoelectric measurements
    Hana Uršič
    Martin Lowe
    Mark Stewart
    Marko Hrovat
    Darko Belavič
    Janez Holc
    Marina Santo Zarnik
    Marija Kosec
    Markys Cain
    [J]. Journal of Electroceramics, 2008, 20 : 11 - 16
  • [6] PZT thick films on different ceramic substrates; piezoelectric measurements
    Ursic, Hana
    Lowe, Martin
    Stewart, Mark
    Hrovat, Marko
    Belavic, Darko
    Holc, Janez
    Zarnik, Marina Santo
    Kosec, Marija
    Cain, Markys
    [J]. JOURNAL OF ELECTROCERAMICS, 2008, 20 (01) : 11 - 16
  • [7] Design and fabrication of macroscopic piezoelectric actuators based on thick PZT films
    Barrow, DA
    Noteboom, R
    Sayer, M
    [J]. INTEGRATED FERROELECTRICS, 1995, 8 (1-2) : 1 - &
  • [8] Fabrication and characterization of piezoelectric micromachined ultrasonic transducers with thick composite PZT films
    Wang, ZH
    Zhu, NG
    Zhu, H
    Miao, JM
    Chao, C
    Zhao, CL
    Tan, OK
    [J]. IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2005, 52 (12) : 2289 - 2297
  • [9] The dielectric properties of the piezoelectric PZT thick films
    Tang, F
    Chinkhota, M
    Brown, WD
    Wang, JT
    [J]. INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 1998, 12 (29-31): : 3412 - 3417
  • [10] Fabrication and bending displacement characteristics of functionally graded PZT/Pt piezoelectric actuators
    Takagi, K
    Li, JF
    Yokoyama, S
    Watanabe, R
    [J]. PRICM 4: FORTH PACIFIC RIM INTERNATIONAL CONFERENCE ON ADVANCED MATERIALS AND PROCESSING, VOLS I AND II, 2001, : 1723 - 1726
12345