Films based on the phases in the Si-C-N System: Part 1. Synthesis and characterization of bis(trimethylsilyl)ethylamine as a precursor

被引：0
|
作者：
S. V. Sysoev
A. O. Kolontaeva
L. D. Nikulina
M. L. Kosinova
F. A. Kuznetsov
V. I. Rakhlin
A. V. Lis
M. G. Voronkov
机构：
[1] Russian Academy of Sciences,Nikolaev Institute of Inorganic Chemistry, Siberian Branch
[2] Russian Academy of Sciences,Favorsky Irkutsk Institute of Chemistry, Siberian Branch
[3] Russian Academy of Sciences,Grebenshchikov Institute of Silicate Chemistry
来源：
Glass Physics and Chemistry | 2012年 / 38卷
关键词：
bis(trimethylsilyl)ethylamine; silicon carbonitride; simulation of CVD process;
D O I：
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摘要：
The characterization of bis(trimethylsilyl)ethylamine was carried out using a combination of IR, UV, 1H, 13C, 29Si, and 15N NMR spectroscopy, as well as elemental analysis. The spectral characteristics of the compound were determined. The temperature dependence of the saturated vapor pressure was established by tensimetric studies, and the thermodynamic characteristics of vaporization were calculated. Thermodynamic simulation of the chemical vapor deposition was performed and was used as a basis for predicting the composition of the deposited phase complexes depending on the type of reagent and the process conditions.
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页码：8 / 14
页数：6
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