Profile Prediction and Fabrication of Wet-Etched Gold Nanostructures for Localized Surface Plasmon Resonance

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作者
Xiaodong Zhou
Nan Zhang
Christina Tan
机构
[1] Technology and Research),Institute of Materials Research and Engineering (IMRE), A*STAR (Agency for Science
关键词
Localized surface plasmon resonance (LSPR); Nanosphere lithography (NSL); Nanofabrication; Plasmonics; Nanoparticles; Profile simulation;
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摘要
Dispersed nanosphere lithography can be employed to fabricate gold nanostructures for localized surface plasmon resonance, in which the gold film evaporated on the nanospheres is anisotropically dry etched to obtain gold nanostructures. This paper reports that by wet etching of the gold film, various kinds of gold nanostructures can be fabricated in a cost-effective way. The shape of the nanostructures is predicted by profile simulation, and the localized surface plasmon resonance spectrum is observed to be shifting its extinction peak with the etching time.
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