Electron auger spectroscopy and reflectance anisotropy spectroscopy of monolayer nitride films on (001) surfaces of GaAs and GaSb crystals

被引:0
|
作者
V. L. Berkovits
A. B. Gordeeva
T. V. L’vova
V. P. Ulin
机构
[1] Russian Academy of Sciences,Ioffe Physical
来源
Semiconductors | 2012年 / 46卷
关键词
GaAs; GaSb; Electron Auger Spectroscopy; Lone Electron Pair; Gallium Nitride;
D O I
暂无
中图分类号
学科分类号
摘要
The methods of electron Auger spectroscopy and reflectance anisotropy spectroscopy are used to study monolayer films of gallium nitride formed on the (001) surface of GaAs by chemical nitridization in hydrazine-sulfide solutions. It is found that the Auger signal for nitrogen N KLL from the nitride film is shifted to higher kinetic energies by ∼17.2 eV in comparison with its position for the same signal for a bulk GaN crystal. The observed shift is caused by the specific configuration of the valence orbitals of nitrogen atoms terminating the nitridized GaAs (001) surface. One of the valence orbitals for these atoms does not form a chemical bond and is occupied by an uncoupled pair of electrons. The suggested configuration is confirmed by the results of an analysis of the spectra of anisotropic reflectance from the nitridized GaAs (001) surface. Experiments with chemical nitridization of a GaSb surface have been performed for the first time. The Auger spectra for a nitridized GaSb (001) surface are found to be similar to those for a nitridized GaAs (001) surface. This is indicative of the similar character of chemical processes on these surfaces and the formation of a monolayer nitride film on the GaSb surface.
引用
收藏
页码:1432 / 1436
页数:4
相关论文
共 50 条
  • [41] AUGER-ELECTRON SPECTROSCOPY OF SILICON SURFACES
    VLACHOVA, B
    CZECHOSLOVAK JOURNAL OF PHYSICS, 1973, B 23 (09) : 931 - 946
  • [42] AUGER-ELECTRON SPECTROSCOPY OF SI SURFACES
    HARMAN, R
    LIDAY, J
    VESELY, M
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, : 823 - 826
  • [43] AUGER-ELECTRON SPECTROSCOPY OF WEAR SURFACES
    MCCARROLL, JJ
    MOULD, RW
    SILVER, HB
    SIMS, ML
    NATURE, 1977, 266 (5602) : 518 - 519
  • [44] Analysis of surfaces and thin films by using auger electron Spectroscopy and x-ray photoelectron Spectroscopy
    Grant, John T.
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2007, 51 (03) : 925 - 932
  • [45] Aspects of reflectance anisotropy spectroscopy from semiconductor surfaces
    Sobiesierski, Z
    Westwood, DI
    Matthai, CC
    JOURNAL OF PHYSICS-CONDENSED MATTER, 1998, 10 (01) : 1 - 43
  • [46] Characterization of the growth of sub-monolayer coverages (1/200th to 1 monolayer) of Si and Be on GaAs(001): a reflectance anisotropy spectroscopy and reflection high-energy electron diffraction study
    Woolf, D.A.
    Rose, K.C.
    Morris, S.J.
    Westwood, D.I.
    Rumberg, J.
    Reinhardt, F.
    Richter, W.
    Williams, R.H.
    Journal of Crystal Growth, 1995, 150 (1 -4 pt 1): : 197 - 201
  • [47] ELEMENTAL ANALYSIS OF SURFACES AND THIN-FILMS WITH AUGER-ELECTRON SPECTROSCOPY
    MACDONAL.NC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1973, 120 (08) : C243 - C243
  • [48] Phase Composition Diagnostics of Surfaces, Thin Films, and Interfaces by Auger Electron Spectroscopy
    Beshenkov, V. G.
    Vyatkin, A. F.
    Znamenskii, A. G.
    Marchenko, V. A.
    JOURNAL OF SURFACE INVESTIGATION-X-RAY SYNCHROTRON AND NEUTRON TECHNIQUES, 2008, 2 (01) : 25 - 33
  • [49] Phase composition diagnostics of surfaces, thin films, and interfaces by Auger electron spectroscopy
    Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Science, Chernogolovka, Moscow oblast 142432, Russia
    J. Surf. Invest., 2008, 1 (25-33): : 25 - 33
  • [50] In situ reflectance difference spectroscopy and reflection high-energy electron diffraction observation of nitridation processes on GaAs(001) surfaces
    Jung, HD
    Kumagai, N
    Hanada, T
    Zhu, Z
    Yao, T
    Yasuda, T
    Kimura, K
    JOURNAL OF APPLIED PHYSICS, 1997, 82 (09) : 4684 - 4686