Study the influence of geometric parameters on the torque of electrostatic micromotors

The influence of geometric parameters on the torque of electrostatic micromotor is studied. The procedure is based on the successive sampling of geometric parameters. These parameters include: stator tooth width, rotor tooth width and slot radius. In order to appraise the electrostatic torque, electrostatic field must first be evaluated. To this end, field simulation is used for evaluating the electrostatic torque. The study is based on the two dimensional finite element analysis of the electrostatic field. The electrostatic torque has been calculated as a function of rotor position and its average and ripple components have been determined. An optimal excitation sequence has been used for supplying the micromotor for maximizing the average value of torque. This study demonstrates optimal values for some geometric parameters as a peripheral result.