Highly reproducible large-area and double-sided pulsed laser deposition of HTSC YBCO:Ag thin films for microwave applications

被引：0
|
作者：
M. Lorenz
H. Hochmuth
D. Natusch
K. Kreher
机构：
[1] Universität Leipzig,
[2] Fakultät für Physik und Geowissenschaften,undefined
[3] Linnéstr. 5,undefined
[4] 04103 Leipzig,undefined
[5] Germany (Fax: +49-341/97-32 698,undefined
[6] E-mail: mlorenz@physik.uni-leipzig.de),undefined
来源：
Applied Physics A | 1999年 / 69卷
关键词：
PACS: 81.15.Fg; 74.76.Bz; 84.30.Vn;
D O I：
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中图分类号：
学科分类号：
摘要：
Large-area pulsed laser deposition (PLD) producing high-quality YBa2Cu3O7-x (YBCO) thin films on both sides of R-plane sapphire substrates with CeO2 buffer layer is used routinely to optimize planar microwave stripline filters for satellite and mobile communication systems. A relatively simple PLD arrangement with fixed laser plume and rotating substrate, with an offset between the laser plume and the center of the substrate is employed to deposit laterally homogeneous 3-inch-diameter Ag-doped YBCO thin films.
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页码：S905 / S911
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