Combined Thin-Film Resistive and Strain-Resistant Structures with Temperature Self-Compensation

被引：0
|
作者：
E. A. Pecherskaya
S. A. Gurin
M. D. Novichkov
机构：
[1] Department of “Information and Measurement Technology and Metrology,
[2] ” Penza State University,undefined
[3] Laboratory for the Development of GIS,undefined
[4] ADC and DAC Resistor Sets Boards (NPK-1),undefined
[5] JSC NIIEMP,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2022年 / 16卷
关键词：
thin-film microelectronics technology; thin-film resistor; pressure-sensor sensing element; temperature coefficient of resistance; resistance instability;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：1074 / 1080
页数：6
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