High-performance optics for thermal microscopy

被引：0
|
作者：
Ikuo Arata
Yoshio Isobe
Toshimichi Ishizuka
机构：
[1] Hamamatsu Photonics K.K.,Systems Division
来源：
Optical Review | 2009年 / 16卷
关键词：
thermal imaging; thermal microscopy; thermal emission analysis; InSb; failure analysis; semiconductor;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We have developed a thermal microscope which has an InSb detector and optics optimized for the camera. Using this system, we evaluated maximum resolution of a 30×/numerical aperture 0.71 lens made of silicon and germanium, and achieved the cutoff frequency of around 300 line pairs/mm, which is almost a diffraction-limited performance. The thermal microscope is installed on the THEMOS-1000, a product of Hamamatsu Photonics, for thermal emission analysis.
引用
收藏
页码：123 / 125
页数：2
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