Thin Near-Surface Layer in a Resist Film

被引：0
|
作者：
V. I. Trigub
A. V. Plotnov
A. N. Kiselev
机构：
[1] Nizhni Novgorod State Technical University,
来源：
Russian Journal of Applied Chemistry | 2003年 / 76卷
关键词：
Polymer; Microscopy; Polymer Film; Resist Film;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The structure of the near-surface layer of a polymer film of a resist was studied by atomic-force microscopy.
引用
收藏
页码：1360 / 1361
页数：1
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