Analysis of High-Purity Volatile Compounds

The current status of the analysis of high-purity volatile substances is considered. Two types of impurities in high-purity volatile substances were distinguished: molecularly dissolved substances and suspended particles. The main factors that restrict the limiting capabilities of analytical techniques were revealed. The attained detection limits were 10–8–10–10% for metal impurities, 10–4–10–8% for organic substances, 10–5–10–9% for water, and 10–5–10–7 for permanent gases. Suspended particles of 0.04–0.003 μm in size were determined by light scattering.