Mode-synthesizing atomic force microscopy for 3D reconstruction of embedded low-density dielectric nanostructures

被引：0

作者：

Pauline Vitry

Eric Bourillot

Cédric Plassard

Yvon Lacroute

Eric Calkins

Laurene Tetard

Eric Lesniewska

机构：

[1] University of Bourgogne,Physics Department

[2] University of Central Florida,Nanoscience Technology Center

[3] University of Central Florida,Department of Physics

来源：

Nano Research | 2015年 / 8卷

关键词：

nanoscale subsurface imaging; atomic force microscopy; 3D reconstruction; nanoscale tomography; acoustic microscopy; dielectric;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Challenges in nanoscale characterization call for non-invasive, yet sensitive subsurface characterization of low-density materials such as polymers. In this work, we present new evidence that mode-synthesizing atomic force microscopy can be used to detect minute changes in low-density materials, such as those engendered in electro-sensitive polymers during electron beam lithography, surpassing all common nanoscale mechanical techniques.

引用

页码：2199 / 2205

页数：6

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