New approach for batch microfabrication of silicon-based micro fuel cells

This paper reports a novel and straightforward approach to the development of a compact micro direct methanol fuel cell. The device consists of a hybrid polymer membrane as a feasible microintegrable electrolyte to be used together with silicon current collectors. These current collectors consist in microfabricated silicon chips that incorporate a fine electrode grid. The membrane combines two polymers with different functionalities, Nafion® as a proton conducting material and PDMS as a flexible mechanical support. The compatibility of this membrane with MEMS fabrication processes lies in the acknowledged bonding capabilities of the PDMS polymer to materials typically used in microsystems technologies—such as silicon, silicon dioxide and glass—as well as its ability to withstand variations of the Nafion® volume. The compatibility of all the components with microfabrication processes will permit the application of batch fabrication techniques for the whole device, so contributing to a significant lowering of the fabrication costs.