High-order theory for arched structures and its application for the study of the electrostatically actuated MEMS devices

A high-order theory for arched rods and beams based on expansion of the two-dimensional (2D) equations of elasticity into Legendre’s polynomials series has been developed. The 2D equations of elasticity have been expanded into Legendre’s polynomials series in terms of a thickness coordinate. Thereby, all equations of elasticity including Hooke’s law have been transformed to corresponding equations for coefficients of Legendre’s polynomials expansion. Then system of differential equations in term of displacements and boundary conditions for the coefficients of Legendre’s polynomials expansion coefficients has been obtained. Cases of the first and second approximations have been considered in details. For obtained boundary-value problems, a finite element method has been used and numerical calculations have been done with COMSOL Multiphysics and MATLAB. Developed theory has been applied for study pull-in instability and stress–strain state of the electrostatically actuated micro-electro-mechanical Systems.