Dynamics of the hydrodynamical growth of columns on silicon exposed to ArF excimer-laser irradiation

被引：0
|
作者：
F. Sánchez
J.L. Morenza
R. Aguiar
J.C. Delgado
M. Varela
机构：
[1] Universitat de Barcelona,
[2] Departament de Física Aplicada i Electrònica,undefined
[3] Avda. Diagonal 647,undefined
[4] E-08028 Barcelona,undefined
[5] Spain (Fax: +34-3/402-1138,undefined
[6] E-mail: fsanchez@electra.fae.ub.es),undefined
来源：
Applied Physics A | 1998年 / 66卷
关键词：
PACS: 81.40 Z; 81.60 Z; 68.70;
D O I：
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学科分类号：
摘要：
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页码：83 / 86
页数：3
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