Study on abrasive belt grinding process assisted by ultrasonic elliptic vibration

Quartz glass has the characteristics of high hardness and wide light transmission range that has important applications in aerospace, microelectronics, biochemical medicine, and so on. It is a typical brittle material that is difficult to fabricate with high precision and high efficiency, and the existing quartz glass effective processing methods mainly include grinding, micro-cutting, and non-traditional machining. In this paper, two-dimensional elliptical ultrasonic vibration abrasive belt grinding is developed which the heat of grinding, tool wear, and grinding force can be reduced. The two-dimensional elliptical vibration abrasive belt grinding equipment is built which can generate elliptic trajectories with amplitude of nearly 8 μm in major axis direction and 5 μm in minor axis direction. The generation of elliptic trajectories is analyzed and simulated according to the motion trajectory equation of grains. The phase difference and rate ratio of elliptic vibration trajectories are determined that the phase difference of 90° is the most reasonable in this paper. The influence law of process parameters on the processing quality was analyzed, and processing experiment was carried out. The machining results show that lower surface roughness will be obtained with the increasing of grinding depth and workpiece feed speed, also more likely to lead to brittleness removal of quartz glass.