Bi0.5Sb1.5Te3/Bi2Te2.4Se0.6 thin film thermoelectric sensors

被引：0
|
作者：
Il-Ho Kim
Kyung-Wook Jang
机构：
[1] Chungju National University,Department of Materials Science and Engineering/ReSEM
[2] Hanseo University,Department of Advanced Materials Engineering/ReSEM
来源：
Metals and Materials International | 2006年 / 12卷
关键词：
thermoelectic; thin film; sensor; temperature; thermal emf; seebeck effect;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
In order to make thin film thermoelectric sensors, p-type (Bi0.5Sb1.5Te3) and n-type (Bi2Te2.4Se0.6) thermoelectric thin films were deposited on Pyrex and Teflon substrates by the flash evaporation technique. Their thermoelectric properties were investigated for annealed (473 K, 1 h) films. Thin film temperature sensors were fabricated and their thermal emf, sensitivity, and time constant were measured and evaluated. The sensor deposited on Teflon substrate showed better performance than that on the Pyrex substrate. The sensitivity and time constant were 2.54 V/W and 13.7 s, respectively, for the sensor with a leg size of 3 mm (w)×16mm (l)×4μm (t).
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页码：269 / 272
页数：3
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