A low-stress and low temperature gradient microgripper for biomedical applications

被引：0
|
作者：
Einas Gaafar
Musaab Zarog
机构：
[1] Sudan University of Sciences and Technology,School of Mechanical Engineering, Faculty of Engineering
[2] Sultan Qaboos University,Department of Mechanical and Industrial Engineering, College of Engineering
来源：
Microsystem Technologies | 2017年 / 23卷
关键词：
Applied Voltage; Silicon Nitride; Polysilicon; Actuation Voltage; Amplification Stage;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Microelectromechanical systems based micro gripper is one of the major focuses for many medical applications such as microsurgery, micro assembling and testing of micro components, and measuring properties of biological cells as well as small-scale tissue manipulation. This paper presents an electrostatically actuated micro gripper. Different materials sets (Si/SiO2 and polysilicon/Si3N4) were investigated to design electrostatic comb drive micro gripper. The main characteristics of the micro gripper were analyzed using a finite element model (ANSYS software). These characteristics include; the maximum displacement of gripper arms, stresses in the micro gripper, the gripping force, and heat generated from joule heating. It is demonstrated that the proposed design will produce negligible increase in temperature and stresses developed during operation because of applying the actuation voltage.
引用
收藏
页码：5415 / 5422
页数：7
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