Selectivity enhancement of gas sensors using non-equilibrium polarisation effects in metal oxide films

被引:0
|
作者
T. Sauerwald
D. Skiera
C.-D. Kohl
机构
[1] Justus-Liebig Universität Giessen,Institute of Applied Physics
来源
Applied Physics A | 2007年 / 87卷
关键词
Tungsten Oxide; Indium Oxide; Relaxation Phase; Selectivity Enhancement; Relative Slope;
D O I
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中图分类号
学科分类号
摘要
The gas sensing behaviour of granular tungsten oxide films under the influence of a polarizing electrical field is investigated. The Ohmic resistance of the film in the direction of applied voltage is altered in a reversible way due to ionic transport processes in the film. Several processes with a wide range of time constants from ∼100 ms to 100 s occur. A model is proposed to describe the movement of bulk donors and related changes of the surface charge. Within the model sensor instabilities are described which can be prevented by a pulse technique for readout. As an benefit a single sensor element used in different polarization states can discern several gases.
引用
收藏
页码:525 / 529
页数:4
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