Technological methods for improving IC reliability in mass production

被引：0
|
作者：
Gorlov M.I. [1 ]
Andreev A.V. [1 ]
Anufriev L.P. [2 ]
Emel'yanov V.A. [2 ]
机构：
[1] Voronezh State Technical University, Voronezh
[2] NPO Integral, Minsk
来源：
Russian Microelectronics | 2004年 / 33卷 / 1期
关键词：
Silicon; Mass Production; Technological Method;
D O I：
10.1023/B:RUMI.0000011096.75737.4c
中图分类号：
学科分类号：
摘要：
Technological methods for improving the reliability of silicon ICs in mass production are discussed. They include low-temperature processing, the compensating technology, and the equalizing technology.
引用
收藏
页码：18 / 26
页数：8
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