Near-infrared absorption enhancement in microstructured silicon by Ag film deposition

被引：0
|
作者：
Yanchao Wang
Jinsong Gao
Haigui Yang
Xiaoyi Wang
机构：
[1] University of the Chinese Academy of Sciences,Key Laboratory of Optical System Advanced Manufacturing Technology
[2] Changchun Institute of Optics,undefined
[3] Fine Mechanics and Physics,undefined
[4] Chinese Academy of Sciences,undefined
来源：
Journal of Materials Science: Materials in Electronics | 2016年 / 27卷
关键词：
Surface Plasmon Resonance; Infrared Absorption; Laser Fluence; Microstructure Surface; Absorption Enhancement;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We investigate the influence of spike-like microstructures formed on the silicon surface via fs-laser scanning with different-size on its near-infrared absorption from 1200 to 2500 nm. Although the infrared absorption of the small size microstructures is obviously lower than the large size, it can be further improved to 90 % by a large amount of random and irregular Ag nano particles from a subsequent deposition of Ag thin film. The origins of absorption enhancement are discussed and theoretically analyzed in detail.
引用
收藏
页码：9002 / 9007
页数：5
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