Piezoelectric PZT MEMS technologies for small-scale robotics and RF applications

Thin-film piezoelectric lead zirconate titanate (PZT) is one of the most efficient electromechanical coupling transducer materials currently available for microelectromechanical systems (MEMS). This article reviews piezoelectric MEMS (piezo MEMS) technologies using PZT thin films in radio frequency (RF) devices for communications and radar applications and in the emerging field of millimeter-scale robotics. The electromechanical material properties of thin-film PZT uniquely enable insect-inspired and insect-scale autonomous robots. Recent progress on large force and displacement actuators for robotic leg joints, compact and high torque ultrasonic motors, and bioinspired millimeter-scale flapping wing platforms will be presented. The use of thin-film PZT to achieve high performance and low-voltage RF MEMS switches, ultralow power consumption nanomechanical logic circuits, and high coupling and low loss resonators, filters, and transformers are also reviewed.