Energy of Clusters Emitted During Ion Sputtering of a Metal

被引：0
|
作者：
V. I. Matveev
S. A. Kochkin
机构：
来源：
Russian Physics Journal | 2004年 / 47卷 / 3期
关键词：
Iron; Gold; Experimental Data; Energy Spectrum; Niobium;
D O I：
10.1023/B:RUPJ.0000038738.22274.a9
中图分类号：
学科分类号：
摘要：
A procedure for calculating the energy spectra of clusters with numbers of atoms N ≥ 5 during ion sputtering of a metal is suggested. The results are presented in the form of simple formulas. The energy distributions of clusters in the bombardment of niobium and iron by atomic gold and xenon ions, calculated in the present work, are compared with the available experimental data.
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页码：235 / 239
页数：4
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