Retraction Note: A MEMS packaged capacitive pressure sensor employing 3C-SiC with operating temperature of 500 °C

被引：0
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作者：
Noraini Marsi
Burhanuddin Yeop Majlis
Azrul Azlan Hamzah
Faisal Mohd-Yasin
机构：
[1] Universiti Kebangsaan Malaysia,Institute of Microengineering and Nanoelectronics
[2] Griffith Univeristy,Queensland Micro
来源：
Microsystem Technologies | 2023年 / 29卷
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页码：903 / 903
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