Structure of (Ba0.7Sr0.3)TiO3 films prepared by chemical solution deposition on sapphire substrates

Barium strontium titanate (BST) films on single-crystal sapphire substrates are prepared by chemical solution deposition upon annealing at temperatures T = 700, 850, and 1000°C. The structure of the BST films is investigated using transmission electron microscopy, high-resolution electron microscopy, and x-ray diffraction. It is established that, upon annealing at T = 700 and 850°C, the film crystallizes in the tetragonal phase of the (Ba0.7Sr0.3)TiO3 perovskite without texture and transition layers. The mean grain sizes are 17 and 37 nm, respectively. However, an increase in the annealing temperature to 1000°C brings about a decrease in the mean grain size to 25 nm and the appearance of additional phases due to the interaction at the film-substrate interface.