Controlled visible photoluminescence of ZnO thin films prepared by RF magnetron sputtering

被引：0
|
作者：
Mingsong Wang
Xiaonong Cheng
Juan Yang
机构：
[1] Jiangsu University,School of Materials Science and Engineering
来源：
Applied Physics A | 2009年 / 96卷
关键词：
78.55.-m; 78.55.Et; 81.15.Cd;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
ZnO thin films were prepared by RF magnetron sputtering. The photoluminescence dependence on the growth ambient and annealing temperatures and the atmosphere has been studied. Visible photoluminescence with blue, green, orange, and red emission bands has been demonstrated by controlling the preparation conditions. Complete suppression of the visible emission bands was also realized by annealing the O2-ambient-grown samples in N2 atmosphere at higher temperatures, which indicated the preparation of ZnO thin films with high optical quality.
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页码：783 / 787
页数：4
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