Conduction mechanisms in co-evaporated mixed Mn/Siox thin films

The thermoelectric power and d.c. conductivity of co-evaporated Mn/SiOx films, 100 nm thick, containing 20 to 100 at% Mn have been measured over the temperature ranges 275 to 580 K and 110 and 575 K, respectively. Three conduction regions have been identified: p-type, via non-polaronic holes and small polarons; intrinsic and metallic. The d.c. conductivity arises from a combination of non-activated and activated processes.