Estimation of detection limits in electron probe X-ray microanalysis

Different local methods of analysis are estimated with the aim of revealing the possibility for determining the minimum concentrations of chemical elements. Among all examined approaches, electron probe X-ray microanalysis (EPMA) has been chosen as the most accurate and promising technique. The dependences between the elemental detection limit and the analyzer’s technical parameters are investigated. It has been ascertained that the experimentally determined detection limits of light elements are substantially higher than those of heavy elements. The reasons leading to the less efficient EPMA of light elements, as well as possible ways of elimination thereof, are discussed. It is demonstrated that an X-ray mirror can be used to reach the theoretically predicted detection limits of B, O, and C.