Characterization of sol–gel thin films by ellipsometric porosimetry

被引:0
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作者
Peer Löbmann
机构
[1] Fraunhofer-Institut für Silicatforschung,
关键词
Ellipsometric Porosimetry; Sol–gel; Thin films; Porosity;
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页码:2 / 15
页数:13
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