A thin subsurface layer of a polymer film studied by atomic force microscopy

被引：0
|
作者：
V. I. Trigub
A. V. Plotnov
A. N. Kiselev
机构：
[1] Nizhni Novgorod State Technical University,
来源：
Technical Physics Letters | 2001年 / 27卷
关键词：
Polymer; Microscopy; Atomic Force Microscope; Layer Thickness; PMMA;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A thin subsurface layer of a PMMA based resist film was studied in an atomic force microscope (AFM). An analysis of the AFM image allowed a modified subsurface layer thickness to be estimated, in which the polymer density is greater than that in the bulk of the film.
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页码：1041 / 1043
页数：2
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