Subsurface defect of the SiOx film imaged by atomic force acoustic microscopy

被引：7

作者：

He Cunfu ^{[1
]}

Zhang Gaimei ^{[1
]}

Wu Bin ^{[1
]}

Wu Zaiqi ^{[1
]}

机构：

[1] Beijing Univ Technol, Coll Mech Engn & Appl Elect Technol, Beijing 100124, Peoples R China

来源：

OPTICS AND LASERS IN ENGINEERING | 2010年 / 48卷 / 11期

基金：

中国国家自然科学基金;

关键词：

SiOx film; Acoustic amplitude image; Atomic force acoustic microscopy; Local elasticity; Subsurface defect; ELASTIC PROPERTIES; BARRIER FILMS; DEPOSITION; COATINGS;

D O I：

10.1016/j.optlaseng.2009.12.014

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Atomic force acoustic microscopy (AFAM) has been developed in order to evaluate mechanical properties of the materials at nano-scale. The SiOx films on the silicon wafer and glass slide were prepared by plasma enhanced chemical vapor deposition (PECVD) and their properties were characterized by atomic force acoustic microscopy (AFAM). The images of the amplitude of the vibrating cantilever were visualized for the sample vibrating at the ultrasonic frequency and the characteristics of the images were also discussed at the different excitation frequencies The results showed that the acoustic amplitude images can provide information about the local elasticity and the subsurface defects of the materials qualitatively (C) 2010 Published by Elsevier Ltd

引用

页码：1108 / 1112

页数：5

共 50 条

[1] Nanomechanical Characterization of SiOx Film by Atomic Force Acoustic Microscopy
He, Cunfu
Zhang, Gaimei
Wu, Bin
Wu, Zaiqi
[J]. PROCEEDINGS OF THE THIRD INTERNATIONAL CONFERENCE ON MECHANICAL ENGINEERING AND MECHANICS, VOLS 1 AND 2, 2009, : 993 - 997
[2] Subsurface defect of amorphous carbon film imaged by near field acoustic microscopy
Zeng, J. T.
Zhao, K. Y.
Zeng, H. R.
Song, H. Z.
Zheng, L. Y.
Li, G. R.
Yin, Q. R.
[J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2008, 91 (02): : 261 - 265
[3] Subsurface defect of amorphous carbon film imaged by near field acoustic microscopy
J.T. Zeng
K.Y. Zhao
H.R. Zeng
H.Z. Song
L.Y. Zheng
G.R. Li
Q.R. Yin
[J]. Applied Physics A, 2008, 91 : 261 - 265
[4] Quantitative measurement of local elasticity of SiOx film by atomic force acoustic microscopy
He Cun-Fu
Zhang Gai-Mei
Wu Bin
[J]. CHINESE PHYSICS B, 2010, 19 (08)
[5] Quantitative measurement of local elasticity of SiOx film by atomic force acoustic microscopy
何存富
张改梅
吴斌
[J]. Chinese Physics B, 2010, 19 (08) : 449 - 455
[6] Visualizing Subsurface Defects in Graphite by Acoustic Atomic Force Microscopy
Wang, Tian
Ma, Chengfu
Hu, Wei
Chen, Yuhang
Chu, Jiaru
[J]. MICROSCOPY RESEARCH AND TECHNIQUE, 2017, 80 (01) : 66 - 74
[7] Tarantula hemocyanins imaged by atomic force microscopy
Möller, M
Decker, H
[J]. MICRON, 2004, 35 (1-2) : 15 - 16
[8] A thin subsurface layer of a polymer film studied by atomic force microscopy
V. I. Trigub
A. V. Plotnov
A. N. Kiselev
[J]. Technical Physics Letters, 2001, 27 : 1041 - 1043
[9] A thin subsurface layer of a polymer film studied by atomic force microscopy
Trigub, VI
Plotnov, AV
Kiselev, AN
[J]. TECHNICAL PHYSICS LETTERS, 2001, 27 (12) : 1041 - 1043
[10] Imaging of subsurface structures using atomic force acoustic microscopy at GHz frequencies
Hu, Shuiqing
Su, Chanmin
Arnold, Walter
[J]. JOURNAL OF APPLIED PHYSICS, 2011, 109 (08)

← 1 2 3 4 5 →