Influence of Nitrogen on Corrosion Resistance of Thin Ti–O–N Films Deposited by Reactive Magnetron Sputtering

被引：0
|
作者：
E. L. Boytsova
F. A. Voroshilov
L. A. Leonova
机构：
[1] Department of Nuclear Fuel Cycle,
[2] Engineering School of Nuclear Technologies,undefined
[3] Tomsk Polytechnic University,undefined
来源：
Inorganic Materials: Applied Research | 2021年 / 12卷
关键词：
nanofilms; titanium dioxide; doping with nitrogen; chemical resistance; corrosion resistance; gravimetry; magnetron sputtering;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：1033 / 1036
页数：3
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