On the Formation of an Anti-Reflection Layer on the Surface of Single-Crystal Silicon by Ion-Beam Etching

被引：0
|
作者：
M. V. Zorina
S. A. Kraev
A. Ya. Lopatin
M. S. Mikhailenko
A. I. Okhapkin
A. A. Perekalov
A. E. Pestov
A. K. Chernyshev
N. I. Chkhalo
I. I. Kuznetsov
机构：
[1] Institute of Physics of Microstructures,
[2] Russian Academy of Sciences,undefined
[3] Institute of Applied Physics,undefined
[4] Russian Academy of Sciences,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2023年 / 17卷
关键词：
black silicon; ion etching; plasma-chemical etching; visible light; IR radiation; roughness;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：S259 / S264
相关论文
共 50 条
  • [1] On the Formation of an Anti-Reflection Layer on the Surface of Single-Crystal Silicon by Ion-Beam Etching
    Zorina, M. V.
    Kraev, S. A.
    Lopatin, A. Ya.
    Mikhailenko, M. S.
    Okhapkin, A. I.
    Perekalov, A. A.
    Pestov, A. E.
    Chernyshev, A. K.
    Chkhalo, N. I.
    Kuznetsov, I. I.
    [J]. JOURNAL OF SURFACE INVESTIGATION, 2023, 17 (SUPPL 1): : S259 - S264
  • [2] ANTI-REFLECTION COATING OF SINGLE-CRYSTAL SILICON
    MOSKALCHENKO, IY
    [J]. SOVIET JOURNAL OF OPTICAL TECHNOLOGY, 1982, 49 (12): : 766 - 767
  • [3] Study of the Influence of Ion-Beam Etching on the Surface Roughness of Single-Crystal Sapphire
    M. S. Mikhailenko
    A. E. Pestov
    M. V. Zorina
    A. K. Chernyshev
    N. I. Chkhalo
    I. E. Shevchuk
    [J]. Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2023, 17 : 1338 - 1342
  • [4] Study of the Influence of Ion-Beam Etching on the Surface Roughness of Single-Crystal Sapphire
    Mikhailenko, M. S.
    Pestov, A. E.
    Zorina, M. V.
    Chernyshev, A. K.
    Chkhalo, N. I.
    Shevchuk, I. E.
    [J]. JOURNAL OF SURFACE INVESTIGATION, 2023, 17 (06): : 1338 - 1342
  • [5] Ion-Beam Synthesis of a Hidden Lead-Silicate Layer in Single-Crystal Silicon
    Buchin, E. Yu.
    Denisenko, Yu. I.
    [J]. GLASS PHYSICS AND CHEMISTRY, 2023, 49 (05) : 535 - 537
  • [6] Ion-Beam Synthesis of a Hidden Lead-Silicate Layer in Single-Crystal Silicon
    E. Yu. Buchin
    Yu. I. Denisenko
    [J]. Glass Physics and Chemistry, 2023, 49 : 535 - 537
  • [7] Formation of a porous silicon anti-reflection layer for a silicon solar cell
    Kim, Jeong
    [J]. JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2007, 50 (04) : 1168 - 1171
  • [8] MOKE investigation of suicide films ion-beam synthesized in single-crystal silicon
    Gumarov, G. G.
    Petukhov, V. Yu.
    Gumarov, A. I.
    Khalikov, R. A.
    Konovalov, D. A.
    Valeev, V. F.
    Khaibullin, R. I.
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 272 : 108 - 111
  • [9] Influence of ion-beam etching by Ar ions with an energy of 200-1000 eV on the roughness and sputtering yield of a single-crystal silicon surface
    Mikhailenko, M. S.
    Pestov, A. E.
    Chkhalo, N., I
    Zorina, M., V
    Chernyshev, A. K.
    Salashchenko, N. N.
    Kuznetsov, I. I.
    [J]. APPLIED OPTICS, 2022, 61 (10) : 2825 - 2833
  • [10] Process of ion-beam surface layer formation
    Baranov, OO
    [J]. ISDEIV: XXTH INTERNATIONAL SYMPOSIUM ON DISCHARGES AND ELECTRICAL INSULATION IN VACUUM, PROCEEDINGS, 2002, 20 : 254 - 256
12345