The Influence of the Substrate Material on the Structure and Electrophysical Properties of BaxSr1 – xTiO3 Thin Films

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作者
M. S. Afanasiev
D. A. Kiselev
S. A. Levashov
V. A. Luzanov
A. A. Nabiyev
V. G. Naryshkina
A. A. Sivov
G. V. Chucheva
机构
[1] Russian Academy of Sciences,Fryazino Branch of Kotel’nikov Institute of Radio Engineering and Electronics
[2] National University of Science and Technology MISiS,undefined
[3] Azerbaijan State Pedagogical University,undefined
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摘要
The high-frequency spraying method has been used to produce BaxSr1–xTiO3 thin films on (111)Pt/(100)Si and SiOx/(100)Si substrates. The synthesized films have proven to be single-phase with a polycrystalline structure. In this paper, we show the influence of the platinum sublayer on such parameters as roughness, mean size of grains, and the local polarization of BaxSr1–xTiO3 thin films. Possible mechanisms of the obtained results related to the intragrain conductivity and the nature of interaction of a ferroelectric film with its substrate are discussed.
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页码:954 / 957
页数:3
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