Role of Mg doping on morphology and photoluminescence features of MgxZn1−xO films prepared by ultrasonic spray pyrolysis

被引:0
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作者
Haiming Zhang
Tingting Zhao
Guofeng Hu
Lingling Miao
Yan Yang
机构
[1] Tianjin Polytechnic University,School of Science
关键词
Doping Concentration; Interstitial Zinc; Ultrasonic Spray Pyrolysis; Obvious Blue Shift; Ultrasonic Spray Pyrolysis Method;
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摘要
The MgxZn1−xO thin films with thickness about several μm were fabricated for different Mg doping concentrations on p-type Si substrates by using an ultrasonic spray pyrolysis method. The morphologies, crystal structures and optical properties were investigated by scanning electron microscopy (SEM), X-ray diffraction (XRD) and photoluminescence (PL), respectively. The SEM results indicated that the surface of MgxZn1−xO films with low Mg concentrations was flat and compact, and the roughness of films increased with Mg concentration. The XRD patterns demonstrated that the low Mg concentration MgxZn1−xO (x < 0.21) film had a wurtzite structure and the MgO phase was absent. The PL spectra revealed that UV emission has an obvious blue shift with the increase of Mg composition.
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页码:1933 / 1937
页数:4
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